Inventor

TSCHISCHGALE JOERG

DE4 patents

⚠️ This page may combine multiple inventors who share the name “TSCHISCHGALE JOERG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ZEISS CARL SMT AG

2 patents

US7423765B2Sep 9, 2008

Optical system of a microlithographic projection exposure apparatus

ZEISS CARL SMT AG6 citations71

US7733501B2Jun 8, 2010

Optical system of a microlithographic projection exposure apparatus

ZEISS CARL SMT AG4 citations60

ZEISS CARL SMT GMBH

1 patent

US7920275B2Apr 5, 2011

Optical system of a microlithographic projection exposure apparatus

ZEISS CARL SMT GMBH2 citations60

INFINEON TECHNOLOGIES AG

1 patent

US7443484B2Oct 28, 2008

Method for exposing a semiconductor wafer by applying periodic movement to a component

INFINEON TECHNOLOGIES AG1 citations49