Inventor

HUANG SHIUH-JER

TW2 patents

Patents

2 patents

US7783580B2Aug 24, 2010

Control method combining fuzzy logic control with sliding mode control for ideal dynamic responses

UNIV NAT TAIWAN SCIENCE TECH16 citations78

US7572173B2Aug 11, 2009

Polishing apparatus and pad replacing method thereof

UNIV NAT TAIWAN SCIENCE TECH7 citations67