Inventor

VAN LIEROP MATHIEUS ANNA KAREL

NL5 patents

⚠️ This page may combine multiple inventors who share the name “VAN LIEROP MATHIEUS ANNA KAREL”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ASML NETHERLANDS BV

3 patents

US10268127B2Apr 23, 2019

Lithographic apparatus and device manufacturing method

ASML NETHERLANDS BV0 citations50

US9645506B2May 9, 2017

Lithographic apparatus and device manufacturing method

ASML NETHERLANDS BV0 citations50

US9625833B2Apr 18, 2017

Substrate table, immersion lithographic apparatus and device manufacturing method

ASML NETHERLANDS BV0 citations50

RIEPEN MICHEL

1 patent

US8634053B2Jan 21, 2014

Lithographic apparatus and device manufacturing method

RIEPEN MICHEL12 citations82

BERKVENS PAUL PETRUS JOANNES

1 patent

US8681308B2Mar 25, 2014

Lithographic apparatus and device manufacturing method

BERKVENS PAUL PETRUS JOANNES1 citations44