Inventor
OOMORI TATSUO
JP12 patents
⚠️ This page may combine multiple inventors who share the name “OOMORI TATSUO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
MITSUBISHI ELECTRIC CORP
11 patentsUS6244211B1Jun 12, 2001
Plasma processing apparatus
MITSUBISHI ELECTRIC CORP193 citations98
US5108535AApr 28, 1992
Dry etching apparatus
MITSUBISHI ELECTRIC CORP83 citations96
US5733405AMar 31, 1998
Plasma processing apparatus
MITSUBISHI ELECTRIC CORP86 citations95
US6417111B2Jul 9, 2002
Plasma processing apparatus
MITSUBISHI ELECTRIC CORP30 citations92
US6020570AFeb 1, 2000
Plasma processing apparatus
MITSUBISHI ELECTRIC CORP23 citations92
US6847511B2Jan 25, 2005
Circuit protecting against electrostatic discharge
MITSUBISHI ELECTRIC CORP29 citations91
US5115135AMay 19, 1992
Ion source
MITSUBISHI ELECTRIC CORP10 citations73
US4893019AJan 9, 1990
Ion current generator system for thin film formation, ion implantation, etching and sputtering
MITSUBISHI ELECTRIC CORP7 citations73
US4710937ADec 1, 1987
Laser system
MITSUBISHI ELECTRIC CORP16 citations73
US4692627ASep 8, 1987
Ion beam generator
MITSUBISHI ELECTRIC CORP11 citations73
US4716295ADec 29, 1987
Ion beam generator
MITSUBISHI ELECTRIC CORP4 citations62