Inventor
KWON OHYUNG
KR4 patents
⚠️ This page may combine multiple inventors who share the name “KWON OHYUNG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SAMSUNG ELECTRONICS CO LTD
3 patentsUS9378931B2Jun 28, 2016
Pulse plasma apparatus and drive method thereof
SAMSUNG ELECTRONICS CO LTD39 citations91
US10629467B2Apr 21, 2020
Electrostatic chuck and plasma apparatus for processing substrates having the same
SAMSUNG ELECTRONICS CO LTD0 citations50
US9870900B2Jan 16, 2018
Methods and systems for managing semiconductor manufacturing equipment
SAMSUNG ELECTRONICS CO LTD0 citations38