P

Inventor

LOSCHNER HANS

AT6 patents
⚠️ This page may combine multiple inventors who share the name “LOSCHNER HANS”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

IMS IONEN MIKROFAB SYST

3 patents
US4924104AMay 8, 1990

Ion beam apparatus and method of modifying substrate

IMS IONEN MIKROFAB SYST10 citations72
US6661015B2Dec 9, 2003

Pattern lock system

IMS IONEN MIKROFAB SYST6 citations60
US6296700B1Oct 2, 2001

Method of producing a structured layer

IMS IONEN MIKROFAB SYST6 citations55

IMS NANOFABRICATION GMBH

1 patent
US7214951B2May 8, 2007

Charged-particle multi-beam exposure apparatus

IMS NANOFABRICATION GMBH53 citations92

OESTERR INVESTITIONSKREDIT

1 patent
US4967088AOct 30, 1990

Method and apparatus for image alignment in ion lithography

OESTERR INVESTITIONSKREDIT99 citations92

IMS INNENMIKROFABRIKATIONS SYS

1 patent
US6989546B2Jan 24, 2006

Particle multibeam lithography

IMS INNENMIKROFABRIKATIONS SYS40 citations89