Inventor
ITO YOSHINAO
JP4 patents
⚠️ This page may combine multiple inventors who share the name “ITO YOSHINAO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SEIKO EPSON CORP
3 patentsUS6447691B1Sep 10, 2002
Method for detecting end point of plasma etching, and plasma etching apparatus
SEIKO EPSON CORP40 citations90
US6440260B1Aug 27, 2002
Plasma monitoring method and semiconductor production apparatus
SEIKO EPSON CORP33 citations90
US6858446B2Feb 22, 2005
Plasma monitoring method and semiconductor production apparatus
SEIKO EPSON CORP2 citations60