Inventor
ADACHI KOUICHIRO
JP9 patents
Patents
9 patentsUS5733820AMar 31, 1998
Dry etching method
SHARP KK45 citations95
US6825528B2Nov 30, 2004
Semiconductor device, method of manufacture thereof, and information processing device
SHARP KK22 citations92
US6426532B1Jul 30, 2002
Semiconductor device and method of manufacture thereof
SHARP KK24 citations92
US6291861B1Sep 18, 2001
Semiconductor device and method for producing the same
SHARP KK20 citations92
US6074568AJun 13, 2000
Dry etching method
SHARP KK22 citations92
US6682966B2Jan 27, 2004
Semiconductor device and method for producing the same
SHARP KK14 citations84
US7176526B2Feb 13, 2007
Semiconductor device, method for producing the same, and information processing apparatus
SHARP KK4 citations63
US6656799B2Dec 2, 2003
Method for producing FET with source/drain region occupies a reduced area
SHARP KK2 citations62
US6515340B2Feb 4, 2003
Semiconductor device
SHARP KK2 citations62