Inventor
RADZIMSKI ZBIGNIEW J
US10 patents
Patents
10 patentsUS6673147B2Jan 6, 2004
High resistivity silicon wafer having electrically inactive dopant and method of producing same
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US6669777B2Dec 30, 2003
Method of producing a high resistivity silicon wafer utilizing heat treatment that occurs during device fabrication
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US6583024B1Jun 24, 2003
High resistivity silicon wafer with thick epitaxial layer and method of producing same
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US6565652B1May 20, 2003
High resistivity silicon wafer and method of producing same using the magnetic field Czochralski method
SEH AMERICA INC8 citations72
US6632277B2Oct 14, 2003
Optimized silicon wafer gettering for advanced semiconductor devices
SEH AMERICA INC11 citations71
US6454852B2Sep 24, 2002
High efficiency silicon wafer optimized for advanced semiconductor devices
SEH AMERICA INC9 citations71
US6565651B2May 20, 2003
Optimized silicon wafer strength for advanced semiconductor devices
SEH AMERICA INC3 citations60
US6395085B2May 28, 2002
Purity silicon wafer for use in advanced semiconductor devices
SEH AMERICA INC3 citations60
US6416391B1Jul 9, 2002
Method of demounting silicon wafers after polishing
SEH AMERICA INC0 citations51
US6669775B2Dec 30, 2003
High resistivity silicon wafer produced by a controlled pull rate czochralski method
SEH AMERICA INC1 citations50