Inventor

HANNES CHARLES

US3 patents

⚠️ This page may combine multiple inventors who share the name “HANNES CHARLES”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

SPEEDFAM IPEC CORP

1 patent

US6106662AAug 22, 2000

Method and apparatus for endpoint detection for chemical mechanical polishing

SPEEDFAM IPEC CORP197 citations96

ELECTRON VISION CORP

1 patent

US6489225B1Dec 3, 2002

Method for controlling dopant profiles and dopant activation by electron beam processing

ELECTRON VISION CORP20 citations91

APPLIED MATERIALS INC

1 patent

US6890825B2May 10, 2005

Method for controlling dopant profiles and dopant activation by electron beam processing

APPLIED MATERIALS INC6 citations72