Inventor
KISHIKAWA YASUHIRO
JP9 patents
⚠️ This page may combine multiple inventors who share the name “KISHIKAWA YASUHIRO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
CANON KK
8 patentsUS7095497B2Aug 22, 2006
Beam splitting apparatus, transmittance measurement apparatus, and exposure apparatus
CANON KK16 citations92
US7251029B2Jul 31, 2007
Birefringence measurement apparatus, strain remover, polarimeter and exposure apparatus
CANON KK12 citations83
US7015456B2Mar 21, 2006
Exposure apparatus that acquires information regarding a polarization state of light from a light source
CANON KK11 citations83
US7286226B2Oct 23, 2007
Method and apparatus for measuring birefringence
CANON KK8 citations73
US7180051B2Feb 20, 2007
Polarization state detecting system, light source, and exposure apparatus
CANON KK4 citations62
US7161675B2Jan 9, 2007
Beam splitting apparatus, transmittance measurement apparatus, and exposure apparatus
CANON KK4 citations62
US6992763B2Jan 31, 2006
Beam splitting apparatus, transmittance measurement apparatus, and exposure apparatus
CANON KK4 citations62
US7733461B2Jun 8, 2010
Exposure apparatus
CANON KK0 citations39