Inventor
D CRUZ LESTER A
US4 patents
Patents
4 patentsUS7611996B2Nov 3, 2009
Multi-stage curing of low K nano-porous films
APPLIED MATERIALS INC10 citations83
US7777197B2Aug 17, 2010
Vacuum reaction chamber with x-lamp heater
APPLIED MATERIALS INC7 citations72
US6664202B2Dec 16, 2003
Mixed frequency high temperature nitride CVD process
APPLIED MATERIALS INC9 citations62
US7547643B2Jun 16, 2009
Techniques promoting adhesion of porous low K film to underlying barrier layer
APPLIED MATERIALS INC6 citations59