Inventor
LIU HELEN
US8 patents
⚠️ This page may combine multiple inventors who share the name “LIU HELEN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
KLA TENCOR CORP
3 patentsUS10217190B2Feb 26, 2019
System and method for reconstructing high-resolution point spread functions from low-resolution inspection images
KLA TENCOR CORP7 citations81
US9897433B2Feb 20, 2018
Method and system for regional phase unwrapping with pattern-assisted correction
KLA TENCOR CORP2 citations72
US10571248B2Feb 25, 2020
Transparent film error correction pattern in wafer geometry system
KLA TENCOR CORP3 citations70