Inventor
SUNG TSAI WEN
US5 patents
⚠️ This page may combine multiple inventors who share the name “SUNG TSAI WEN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
MATTSON TECH INC
4 patentsUS11276560B2Mar 15, 2022
Spacer etching process
MATTSON TECH INC4 citations71
US11387115B2Jul 12, 2022
Silicon mandrel etch after native oxide punch-through
MATTSON TECH INC4 citations70
US11462413B2Oct 4, 2022
Processing of workpieces using deposition process and etch process
MATTSON TECH INC0 citations50
US11195718B2Dec 7, 2021
Spacer open process by dual plasma
MATTSON TECH INC0 citations49