Inventor

WU HUANG-MING

TW2 patents

Patents

2 patents

US10877380B1Dec 29, 2020

Using inverse lithography technology in a method of mask data preparation for generating integrated circuit

TAIWAN SEMICONDUCTOR MFG CO LTD14 citations77

US11209728B2Dec 28, 2021

Mask and method for fabricating the same

TAIWAN SEMICONDUCTOR MFG CO LTD1 citations56