Inventor

CAMPLAN JEAN

FR3 patents

Patents

3 patents

US4254340AMar 3, 1981

High current ion implanter

ANVAR21 citations78

US4207489AJun 10, 1980

Movable extraction electrode for an ion source

ANVAR18 citations69

US4236097ANov 25, 1980

Ion source having fluid-cooled supply conductors

ANVAR1 citations48