P

Inventor

SASAKI YUKO

US43 patents
⚠️ This page may combine multiple inventors who share the name “SASAKI YUKO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

HITACHI HIGH TECH CORP

25 patents
US7875858B2Jan 25, 2011

Charged particle beam trajectory corrector and charged particle beam apparatus

HITACHI HIGH TECH CORP13 citations84
US7728294B2Jun 1, 2010

Semiconductor wafer inspection tool and semiconductor wafer inspection method

HITACHI HIGH TECH CORP18 citations84
US7872240B2Jan 18, 2011

Corrector for charged-particle beam aberration and charged-particle beam apparatus

HITACHI HIGH TECH CORP7 citations83
US7241996B2Jul 10, 2007

Charged particle beam apparatus

HITACHI HIGH TECH CORP8 citations74
US10319558B2Jun 11, 2019

Charged particle beam device

HITACHI HIGH TECH CORP2 citations73
US10991542B2Apr 27, 2021

Charged particle beam device

HITACHI HIGH TECH CORP2 citations72
US9305745B2Apr 5, 2016

Scanning electron microscope

HITACHI HIGH TECH CORP3 citations72
US9159529B2Oct 13, 2015

Scanning electron microscope

HITACHI HIGH TECH CORP3 citations63
US7947964B2May 24, 2011

Charged particle beam orbit corrector and charged particle beam apparatus

HITACHI HIGH TECH CORP6 citations63
US7435960B2Oct 14, 2008

Charged particle beam apparatus

HITACHI HIGH TECH CORP2 citations63
US7425702B2Sep 16, 2008

Charged particle beam apparatus

HITACHI HIGH TECH CORP2 citations63
US12394586B2Aug 19, 2025

Charged particle beam device

HITACHI HIGH TECH CORP0 citations62
US10566172B2Feb 18, 2020

Charged particle beam apparatus and method for adjusting imaging conditions for the same

HITACHI HIGH TECH CORP1 citations61
US12334299B2Jun 17, 2025

Charged particle beam device

HITACHI HIGH TECH CORP0 citations56
US9941095B2Apr 10, 2018

Charged particle beam apparatus

HITACHI HIGH TECH CORP1 citations52
US9318299B2Apr 19, 2016

Charged particle beam device having an energy filter

HITACHI HIGH TECH CORP1 citations52
US7714289B2May 11, 2010

Charged particle beam apparatus

HITACHI HIGH TECH CORP0 citations52
US10770266B2Sep 8, 2020

Charged particle beam device and capturing condition adjusting method in charged particle beam device

HITACHI HIGH TECH CORP0 citations51
US9960006B2May 1, 2018

Charged-particle-beam device

HITACHI HIGH TECH CORP1 citations51
US11898968B2Feb 13, 2024

Inspection apparatus adjustment system and inspection apparatus adjustment method

HITACHI HIGH TECH CORP0 citations50
US7935925B2May 3, 2011

Charged particle beam scanning method and charged particle beam apparatus

HITACHI HIGH TECH CORP1 citations49
US12573586B2Mar 10, 2026

Charged particle beam apparatus

HITACHI HIGH TECH CORP0 citations48
US11152186B2Oct 19, 2021

Charged particle beam device

HITACHI HIGH TECH CORP0 citations47
US10692687B2Jun 23, 2020

Measurement and inspection device

HITACHI HIGH TECH CORP0 citations42
US10707047B2Jul 7, 2020

Measuring device and measuring method

HITACHI HIGH TECH CORP0 citations41

HITACHI LTD

5 patents

SEIKO INSTR INC

4 patents

SASAKI YUKO

3 patents

YANO HIROKO

1 patent

UNIV SAPPORO MEDICAL

1 patent

ITO HIROYUKI

1 patent

UMEKAWA HIDEKI

1 patent

NAT INSTITUTE OF INFECTIOUS DISEASES

1 patent

MATSUDA KAZUHIRO

1 patent