Inventor
MIZUKOSHI KATSUROU
JP3 patents
Patents
3 patentsUS5208437AMay 4, 1993
Method of cutting interconnection pattern with laser and apparatus thereof
HITACHI LTD139 citations97
US5229569AJul 20, 1993
Laser machining apparatus and method of the same
HITACHI LTD24 citations91
US4609566ASep 2, 1986
Method and apparatus for repairing defects on a photo-mask pattern
HITACHI LTD53 citations91