Inventor
MORITA KOYO
JP8 patents
⚠️ This page may combine multiple inventors who share the name “MORITA KOYO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI LTD
7 patentsUS5208437AMay 4, 1993
Method of cutting interconnection pattern with laser and apparatus thereof
HITACHI LTD139 citations97
US4598197AJul 1, 1986
Projection aligner
HITACHI LTD41 citations93
US5229569AJul 20, 1993
Laser machining apparatus and method of the same
HITACHI LTD24 citations91
US4298273ANov 3, 1981
Projection aligner and method of positioning a wafer
HITACHI LTD34 citations89
US4780606AOct 25, 1988
Projection aligner method utilizing monitoring of light quantity
HITACHI LTD14 citations79
US4701608AOct 20, 1987
Projection aligner with a sensor for monitoring light quantity
HITACHI LTD19 citations79
US4218136AAug 19, 1980
Method of and apparatus for aligning photomask
HITACHI LTD12 citations73