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Inventor
YASUDA ARTHUR K
US
3 patents
⚠️ This page may combine multiple inventors who share the name “YASUDA ARTHUR K”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LAM RES CORP
2 patents
US5200232A
Apr 6, 1993
Reaction chamber design and method to minimize particle generation in chemical vapor deposition reactors
LAM RES CORP
132 citations
97
US5368646A
Nov 29, 1994
Reaction chamber design to minimize particle generation in chemical vapor deposition reactors
LAM RES CORP
23 citations
91
PETROPHYSICAL SERVICES INC
1 patent
US4715469A
Dec 29, 1987
Borehole seismic receiver
PETROPHYSICAL SERVICES INC
36 citations
91