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Inventor
ABE NOBUNORI
JP
6 patents
⚠️ This page may combine multiple inventors who share the name “ABE NOBUNORI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
NIPPON ZEON CO
4 patents
US5688628A
Nov 18, 1997
Resist composition
NIPPON ZEON CO
39 citations
90
US6309795B1
Oct 30, 2001
Resist composition
NIPPON ZEON CO
9 citations
72
US5773190A
Jun 30, 1998
Resist composition
NIPPON ZEON CO
10 citations
72
US6010826A
Jan 4, 2000
Resist composition
NIPPON ZEON CO
9 citations
68
FUJITSU LTD
1 patent
US5707784A
Jan 13, 1998
Method of forming chemically amplified resist pattern and manufacturing for semiconductor device by using the chemically amplified resist pattern
FUJITSU LTD
36 citations
92
ZEON CORP
1 patent
US10626205B2
Apr 21, 2020
Method for producing copolymer
ZEON CORP
1 citations
52