Inventor
LUSCHER PAUL
US4 patents
Patents
4 patentsUS6432259B1Aug 13, 2002
Plasma reactor cooled ceiling with an array of thermally isolated plasma heated mini-gas distribution plates
APPLIED MATERIALS INC104 citations96
US6232236B1May 15, 2001
Apparatus and method for controlling plasma uniformity in a semiconductor wafer processing system
APPLIED MATERIALS INC134 citations96
US6353210B1Mar 5, 2002
Correction of wafer temperature drift in a plasma reactor based upon continuous wafer temperature measurements using and in-situ wafer temperature optical probe
APPLIED MATERIALS INC85 citations95
US6575622B2Jun 10, 2003
Correction of wafer temperature drift in a plasma reactor based upon continuous wafer temperature measurements using an in-situ wafer temperature optical probe
APPLIED MATERIALS INC31 citations90