P

Inventor

JUNGHAEHNEL MICHAEL

DE5 patents
⚠️ This page may combine multiple inventors who share the name “JUNGHAEHNEL MICHAEL”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

IBM

3 patents
US6063245AMay 16, 2000

Magnetron sputtering method and apparatus utilizing a pulsed energy pattern

IBM85 citations91
US6019876AFeb 1, 2000

Pulsed DC sputtering method of thin film magnetic disks

IBM20 citations88
US6436248B1Aug 20, 2002

Thin film disk with barrier layer

IBM11 citations67

FRAUNHOFER GES FORSCHUNG

1 patent
US6340416B1Jan 22, 2002

Process and system for operating magnetron discharges

FRAUNHOFER GES FORSCHUNG48 citations91

FRAUNHOFER GESELLSCHAFTT ZUR F

1 patent
US6605312B2Aug 12, 2003

Method of producing a thin-film system

FRAUNHOFER GESELLSCHAFTT ZUR F8 citations62