Inventor

DIAZ DE LA RUBIA TOMAS

US2 patents

Patents

2 patents

US6498078B2Dec 24, 2002

Method for enhancing the solubility of boron and indium in silicon

UNIV CALIFORNIA2 citations57

US6872455B2Mar 29, 2005

Semiconductor material and method for enhancing solubility of a dopant therein

UNIV CALIFORNIA0 citations46