Inventor
HAMAKER H CHRISTOPHER
US2 patents
Patents
2 patentsUS6998217B2Feb 14, 2006
Critical dimension edge placement and slope enhancement with central pixel dose addition and modulated inner pixels
APPLIED MATERIALS INC31 citations90
US6819450B1Nov 16, 2004
Enhanced edge resolution and critical dimension linearity in lithography
APPLIED MATERIALS INC7 citations70