Inventor
JOLLEY MATTHEW J
US8 patents
⚠️ This page may combine multiple inventors who share the name “JOLLEY MATTHEW J”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ETEC SYSTEMS INC
3 patentsAPPLIED MATERIALS INC
3 patentsUS6998217B2Feb 14, 2006
Critical dimension edge placement and slope enhancement with central pixel dose addition and modulated inner pixels
APPLIED MATERIALS INC31 citations90
US6819450B1Nov 16, 2004
Enhanced edge resolution and critical dimension linearity in lithography
APPLIED MATERIALS INC7 citations70
US6812474B2Nov 2, 2004
Pattern generation method and apparatus using cached cells of hierarchical data
APPLIED MATERIALS INC3 citations55