Inventor
LEE EUNG-SUG
KR11 patents
⚠️ This page may combine multiple inventors who share the name “LEE EUNG-SUG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
KOREA MACH & MATERIALS INST
8 patentsUS7914693B2Mar 29, 2011
Stamp for micro/nano imprint lithography using diamond-like carbon and method of fabricating the same
KOREA MACH & MATERIALS INST65 citations96
US6943117B2Sep 13, 2005
UV nanoimprint lithography process using elementwise embossed stamp and selectively additive pressurization
KOREA MACH & MATERIALS INST88 citations95
US7082683B2Aug 1, 2006
Method for attaching rod-shaped nano structure to probe holder
KOREA MACH & MATERIALS INST35 citations92
US7442316B2Oct 28, 2008
Microcontact printing method using imprinted nanostructure and nanostructure thereof
KOREA MACH & MATERIALS INST14 citations81
US7645133B2Jan 12, 2010
UV nanoimprint lithography process and apparatus
KOREA MACH & MATERIALS INST2 citations60
US9028639B2May 12, 2015
Method of manufacturing stamp for plasmonic nanolithography apparatus and plasmonic nanolithography apparatus
KOREA MACH & MATERIALS INST0 citations50
US9791601B2Oct 17, 2017
Method for fabricating an embedded pattern using a transfer-based imprinting
KOREA MACH & MATERIALS INST1 citations49
US8025830B2Sep 27, 2011
UV nanoimprint lithography process and apparatus
KOREA MACH & MATERIALS INST1 citations49