P

Inventor

HEALD DAVID

US11 patents
⚠️ This page may combine multiple inventors who share the name “HEALD DAVID”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

QUALCOMM MEMS TECHNOLOGIES INC

3 patents
US7561321B2Jul 14, 2009

Process and structure for fabrication of MEMS device having isolated edge posts

QUALCOMM MEMS TECHNOLOGIES INC46 citations95
US7733552B2Jun 8, 2010

MEMS cavity-coating layers and methods

QUALCOMM MEMS TECHNOLOGIES INC18 citations92
US7738158B2Jun 15, 2010

Electromechanical device treatment with water vapor

QUALCOMM MEMS TECHNOLOGIES INC4 citations60

NANOSYS INC

2 patents
US7115971B2Oct 3, 2006

Nanowire varactor diode and methods of making same

NANOSYS INC95 citations97
US7667296B2Feb 23, 2010

Nanowire capacitor and methods of making same

NANOSYS INC18 citations92

QUALCOMM INC

1 patent
US7321457B2Jan 22, 2008

Process and structure for fabrication of MEMS device having isolated edge posts

QUALCOMM INC154 citations97

ALAM KHURSHID SYED

1 patent
US8536059B2Sep 17, 2013

Equipment and methods for etching of MEMS

ALAM KHURSHID SYED11 citations78

LONDERGAN ANA R

1 patent
US8164815B2Apr 24, 2012

MEMS cavity-coating layers and methods

LONDERGAN ANA R6 citations78

SMIRNOV STANISLAV Y

1 patent
US9285687B2Mar 15, 2016

Inspection apparatus, lithographic apparatus, and device manufacturing method

SMIRNOV STANISLAV Y2 citations60

TU THANH NGHIA

1 patent
US8222066B2Jul 17, 2012

Eliminate release etch attack by interface modification in sacrificial layers

TU THANH NGHIA1 citations43

LIN YEN HUA

1 patent
US8435838B2May 7, 2013

Optimization of desiccant usage in a MEMS package

LIN YEN HUA0 citations41