Inventor
YOOK SUNWOO
KR3 patents
Patents
3 patentsUS12431340B2Sep 30, 2025
Exhaust gas processing apparatus having plasma source and substrate processing apparatus including the same
SAMSUNG ELECTRONICS CO LTD0 citations52
US11549178B2Jan 10, 2023
Apparatus for treating semiconductor process gas and method of treating semiconductor process gas
SAMSUNG ELECTRONICS CO LTD0 citations51
US11738299B2Aug 29, 2023
Exhaust gas processing system including adsorbent for suppressing powder-like byproduct
SAMSUNG ELECTRONICS CO LTD0 citations41