Inventor

LEE JIHNKOO

KR2 patents

Patents

2 patents

US11549178B2Jan 10, 2023

Apparatus for treating semiconductor process gas and method of treating semiconductor process gas

SAMSUNG ELECTRONICS CO LTD0 citations51

US11738299B2Aug 29, 2023

Exhaust gas processing system including adsorbent for suppressing powder-like byproduct

SAMSUNG ELECTRONICS CO LTD0 citations41