Inventor
PYEON JUNGJOON
KR4 patents
Patents
4 patentsUS11549178B2Jan 10, 2023
Apparatus for treating semiconductor process gas and method of treating semiconductor process gas
SAMSUNG ELECTRONICS CO LTD0 citations51
US12577672B2Mar 17, 2026
Reaction gas supply system
SAMSUNG ELECTRONICS CO LTD0 citations43
US11660563B2May 30, 2023
Apparatus for collecting by-product and method for collecting by-product
SAMSUNG ELECTRONICS CO LTD0 citations43
US11738299B2Aug 29, 2023
Exhaust gas processing system including adsorbent for suppressing powder-like byproduct
SAMSUNG ELECTRONICS CO LTD0 citations41