Inventor
HWANG JONGHA
KR2 patents
Patents
2 patentsUS11549178B2Jan 10, 2023
Apparatus for treating semiconductor process gas and method of treating semiconductor process gas
SAMSUNG ELECTRONICS CO LTD0 citations51
US11738299B2Aug 29, 2023
Exhaust gas processing system including adsorbent for suppressing powder-like byproduct
SAMSUNG ELECTRONICS CO LTD0 citations41