Inventor

NAKAYA KAZUO

JP4 patents

⚠️ This page may combine multiple inventors who share the name “NAKAYA KAZUO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

KOKUSAI ELECTRIC CORP

3 patents

US12428729B2Sep 30, 2025

Substrate processing apparatus, method of manufacturing semiconductor device, and non-transitory computer-readable recording medium storing program

KOKUSAI ELECTRIC CORP0 citations42

US12538730B2Jan 27, 2026

Substrate processing apparatus, method of manufacturing semiconductor device, and recording medium

KOKUSAI ELECTRIC CORP0 citations41

US11060190B2Jul 13, 2021

Substrate processing apparatus and control system

KOKUSAI ELECTRIC CORP0 citations41

HITACHI INT ELECTRIC INC

1 patent

US9690879B2Jun 27, 2017

Substrate processing apparatus, method of manufacturing semiconductor device, and method of generating recipe

HITACHI INT ELECTRIC INC0 citations36