Inventor
PETRO WILLIAM GEORGE
US4 patents
Patents
4 patentsUS11306395B2Apr 19, 2022
Methods for depositing a transition metal nitride film on a substrate by atomic layer deposition and related deposition apparatus
ASM IP HOLDING BV7 citations84
US11976361B2May 7, 2024
Methods for depositing a transition metal nitride film on a substrate by atomic layer deposition and related deposition apparatus
ASM IP HOLDING BV2 citations72
US12467140B2Nov 11, 2025
Showerhead assembly and components
ASM IP HOLDING BV0 citations47
US11830731B2Nov 28, 2023
Semiconductor deposition reactor manifolds
ASM IP HOLDING BV0 citations47