Inventor

EBERL WOLFGANG

DE4 patents

Patents

4 patents

US6368082B1Apr 9, 2002

Vacuum pump with rotor supporting gas bearings

PFEIFFER VACUUM GMBH14 citations82

US6409477B1Jun 25, 2002

Vacuum pump

PFEIFFER VACUUM GMBH14 citations78

US6464451B1Oct 15, 2002

Vacuum pump

PFEIFFER VACUUM GMBH10 citations71

US6676384B2Jan 13, 2004

Gas friction pump

PFEIFFER VACUUM GMBH6 citations58