Inventor
EGOROV EVGUENY E
RU4 patents
Patents
4 patentsUS6898780B2May 24, 2005
Method and system for constructing a hierarchy-driven chip covering for optical proximity correction
LSI LOGIC CORP12 citations82
US6813758B2Nov 2, 2004
Optical proximity correction driven hierarchy
LSI LOGIC CORP7 citations71
US7340706B2Mar 4, 2008
Method and system for analyzing the quality of an OPC mask
LSI LOGIC CORP7 citations69
US6785871B2Aug 31, 2004
Automatic recognition of an optically periodic structure in an integrated circuit design
LSI LOGIC CORP1 citations49