Inventor
YANG QINGYUN
US17 patents
⚠️ This page may combine multiple inventors who share the name “YANG QINGYUN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
IBM
8 patentsUS6864041B2Mar 8, 2005
Gate linewidth tailoring and critical dimension control for sub-100 nm devices using plasma etching
IBM538 citations98
US6960510B2Nov 1, 2005
Method of making sub-lithographic features
IBM21 citations92
US6541320B2Apr 1, 2003
Method to controllably form notched polysilicon gate structures
IBM32 citations92
US7816275B1Oct 19, 2010
Gate patterning of nano-channel devices
IBM13 citations84
US7435652B1Oct 14, 2008
Integration schemes for fabricating polysilicon gate MOSFET and high-K dielectric metal gate MOSFET
IBM11 citations84
US6828187B1Dec 7, 2004
Method for uniform reactive ion etching of dual pre-doped polysilicon regions
IBM17 citations83
US6703269B2Mar 9, 2004
Method to form gate conductor structures of dual doped polysilicon
IBM13 citations83
US6509219B2Jan 21, 2003
Fabrication of notched gates by passivating partially etched gate sidewalls and then using an isotropic etch
IBM17 citations83
TOKYO ELECTRON LTD
4 patentsUS11258012B2Feb 22, 2022
Oxygen-free plasma etching for contact etching of resistive random access memory
TOKYO ELECTRON LTD5 citations69
US11844290B2Dec 12, 2023
Plasma co-doping to reduce the forming voltage in resistive random access memory (ReRAM) devices
TOKYO ELECTRON LTD1 citations60
US12057322B2Aug 6, 2024
Methods for etching metal films using plasma processing
TOKYO ELECTRON LTD0 citations59
US10651372B2May 12, 2020
Process for patterning a magnetic tunnel junction
TOKYO ELECTRON LTD0 citations51