Inventor
JASSMANN MARCO
DE3 patents
Patents
3 patentsUS8879046B2Nov 4, 2014
Method for moving an optical element of a projection exposure apparatus for microlithography
ZEISS CARL SMT GMBH3 citations55
US9116440B2Aug 25, 2015
Optical module for guiding a radiation beam
ZEISS CARL SMT GMBH2 citations54
US9804501B2Oct 31, 2017
Optical component
ZEISS CARL SMT GMBH1 citations46