Inventor
KATO KOUJI
JP9 patents
⚠️ This page may combine multiple inventors who share the name “KATO KOUJI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SUMITOMO HEAVY IND ION TECHNOLOGY CO LTD
2 patentsUS9269541B2Feb 23, 2016
High energy ion implanter, beam current adjuster, and beam current adjustment method
SUMITOMO HEAVY IND ION TECHNOLOGY CO LTD11 citations82
US9373481B2Jun 21, 2016
High-energy ion implanter, beam collimator, and beam collimation method
SUMITOMO HEAVY IND ION TECHNOLOGY CO LTD2 citations52