Inventor

Zaninovich Jorge Jose

US2 patents

Patents

2 patents

US10522377B2Dec 31, 2019

System and method for substrate support feed-forward temperature control based on RF power

LAM RES CORP1 citations58

US10509425B2Dec 17, 2019

Virtual metrology method for ESC temperature estimation using thermal control elements

LAM RES CORP0 citations32