Inventor

SETHI SATYENDRA

US7 patents

⚠️ This page may combine multiple inventors who share the name “SETHI SATYENDRA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

VLSI TECHNOLOGY INC

6 patents

US6297170B1Oct 2, 2001

Sacrificial multilayer anti-reflective coating for mos gate formation

VLSI TECHNOLOGY INC240 citations97

US5883011AMar 16, 1999

Method of removing an inorganic antireflective coating from a semiconductor substrate

VLSI TECHNOLOGY INC105 citations97

US5776821AJul 7, 1998

Method for forming a reduced width gate electrode

VLSI TECHNOLOGY INC80 citations95

US6411367B1Jun 25, 2002

Modified optics for imaging of lens limited subresolution features

VLSI TECHNOLOGY INC14 citations83

US6372522B1Apr 16, 2002

Use of optimized film stacks for increasing absorption for laser repair of fuse links

VLSI TECHNOLOGY INC3 citations62

US6162650ADec 19, 2000

Via alignment, etch completion, and critical dimension measurement method and structure

VLSI TECHNOLOGY INC3 citations61

VSLI TECHNOLOGY INC

1 patent

US6215129B1Apr 10, 2001

Via alignment, etch completion, and critical dimension measurement method and structure

VSLI TECHNOLOGY INC11 citations72