Inventor

PARK CHUL-KYUN

KR2 patents

Patents

2 patents

US10859901B2Dec 8, 2020

Pellicle for EUV lithography and method of fabricating the same

S&S TECH CO LTD10 citations80

US10768523B2Sep 8, 2020

Pellicle for EUV lithography and method of fabricating the same

S&S TECH CO LTD7 citations80