Inventor
HOSOYA MASANORI
JP9 patents
⚠️ This page may combine multiple inventors who share the name “HOSOYA MASANORI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
7 patentsUS10529583B2Jan 7, 2020
Etching method
TOKYO ELECTRON LTD2 citations67
US11710643B2Jul 25, 2023
Method of etching and plasma processing apparatus
TOKYO ELECTRON LTD0 citations56
US10734205B2Aug 4, 2020
Cleaning method and plasma processing apparatus
TOKYO ELECTRON LTD1 citations56
US11710644B2Jul 25, 2023
Etching method and plasma processing apparatus
TOKYO ELECTRON LTD0 citations55
US10957515B2Mar 23, 2021
Plasma processing method and plasma processing apparatus
TOKYO ELECTRON LTD0 citations50
US12014930B2Jun 18, 2024
Etching method and plasma processing apparatus
TOKYO ELECTRON LTD0 citations46
US11955342B2Apr 9, 2024
Method of etching and apparatus for plasma processing
TOKYO ELECTRON LTD0 citations40