Inventor
FARHADZADEH FARZAD
US5 patents
⚠️ This page may combine multiple inventors who share the name “FARHADZADEH FARZAD”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
3 patentsUS12112260B2Oct 8, 2024
Metrology apparatus and method for determining a characteristic of one or more structures on a substrate
ASML NETHERLANDS BV0 citations50
US10794693B2Oct 6, 2020
Metrology method, apparatus and computer program
ASML NETHERLANDS BV0 citations49
US10451978B2Oct 22, 2019
Metrology parameter determination and metrology recipe selection
ASML NETHERLANDS BV0 citations49