Inventor

REISS IRA

US8 patents

⚠️ This page may combine multiple inventors who share the name “REISS IRA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TOKYO ELECTRON LTD

3 patents

US6258228B1Jul 10, 2001

Wafer holder and clamping ring therefor for use in a deposition chamber

TOKYO ELECTRON LTD39 citations91

US5958134ASep 28, 1999

Process equipment with simultaneous or sequential deposition and etching capabilities

TOKYO ELECTRON LTD28 citations89

US6183523B1Feb 6, 2001

Apparatus for thermal control of variously sized articles in vacuum

TOKYO ELECTRON LTD5 citations62

SONY CORP

2 patents

US5795448AAug 18, 1998

Magnetic device for rotating a substrate

SONY CORP95 citations96

US5879524AMar 9, 1999

Composite backing plate for a sputtering target

SONY CORP48 citations92

(unassigned)

1 patent

US6425988B1Jul 30, 2002

Method and system using power modulation for maskless vapor deposition of spatially graded thin film and multilayer coatings with atomic-level precision and accuracy

VEECO INSTR INC

1 patent

US7183716B2Feb 27, 2007

Charged particle source and operation thereof

VEECO INSTR INC46 citations88

DRUZ BORIS

1 patent

US9206500B2Dec 8, 2015

Method and apparatus for surface processing of a substrate using an energetic particle beam

DRUZ BORIS4 citations69