Inventor

SCADUTO ANTHONY F

US4 patents

Patents

4 patents

US4707218ANov 17, 1987

Lithographic image size reduction

IBM220 citations96

US4666556AMay 19, 1987

Trench sidewall isolation by polysilicon oxidation

IBM236 citations95

US4871630AOct 3, 1989

Mask using lithographic image size reduction

IBM68 citations93

US4474864AOct 2, 1984

Method for dose calculation of photolithography projection printers through bleaching of photo-active compound in a photoresist

IBM16 citations71