Inventor
YANG BAO-RU
TW4 patents
Patents
4 patentsUS5639342AJun 17, 1997
Method of monitoring and controlling a silicon nitride etch step
TAIWAN SEMICONDUCTOR MFG26 citations92
US6227211B1May 8, 2001
Uniformity improvement of high aspect ratio contact by stop layer
TAIWAN SEMICONDUCTOR MFG23 citations87
US5904570AMay 18, 1999
Method for polymer removal after etching
TAIWAN SEMICONDUCTOR MFG17 citations83
US5763316AJun 9, 1998
Substrate isolation process to minimize junction leakage
TAIWAN SEMICONDUCTOR MFG6 citations61