Inventor
ARORA RIKHIT
US7 patents
⚠️ This page may combine multiple inventors who share the name “ARORA RIKHIT”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SONY CORP
3 patentsUS5628829AMay 13, 1997
Method and apparatus for low temperature deposition of CVD and PECVD films
SONY CORP270 citations98
US5567483AOct 22, 1996
Process for plasma enhanced anneal of titanium nitride
SONY CORP62 citations96
US5610106AMar 11, 1997
Plasma enhanced chemical vapor deposition of titanium nitride using ammonia
SONY CORP48 citations92
MATERIALS RESEARCH CORP
3 patentsUS5370739ADec 6, 1994
Rotating susceptor semiconductor wafer processing cluster tool module useful for tungsten CVD
MATERIALS RESEARCH CORP188 citations98
US5273588ADec 28, 1993
Semiconductor wafer processing CVD reactor apparatus comprising contoured electrode gas directing means
MATERIALS RESEARCH CORP228 citations98
US5356476AOct 18, 1994
Semiconductor wafer processing method and apparatus with heat and gas flow control
MATERIALS RESEARCH CORP151 citations97