Inventor
KOHAMA TATSUYA
JP9 patents
⚠️ This page may combine multiple inventors who share the name “KOHAMA TATSUYA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
EBARA CORP
7 patentsUS6663469B2Dec 16, 2003
Polishing method and apparatus
EBARA CORP57 citations95
US10157722B2Dec 18, 2018
Inspection device
EBARA CORP3 citations73
US7960188B2Jun 14, 2011
Polishing method
EBARA CORP3 citations62
US8884225B2Nov 11, 2014
Sample observing device and sample observing method
EBARA CORP1 citations52
US11217421B2Jan 4, 2022
Adjustment method and electron beam device
EBARA CORP0 citations51
US9105444B2Aug 11, 2015
Electro-optical inspection apparatus and method with dust or particle collection function
EBARA CORP0 citations51
US7077730B2Jul 18, 2006
Method and apparatus for polishing a workpiece
EBARA CORP0 citations48