Inventor
KOH KWANG-OK
KR3 patents
Patents
3 patentsUS6767814B2Jul 27, 2004
Semiconductor device having silicide thin film and method of forming the same
SAMSUNG ELECTRONICS CO LTD14 citations82
US7385260B2Jun 10, 2008
Semiconductor device having silicide thin film and method of forming the same
SAMSUNG ELECTRONICS CO LTD4 citations60
US7202180B2Apr 10, 2007
Methods of forming semiconductor devices using an etch stop layer
SAMSUNG ELECTRONICS CO LTD4 citations59